| 摘要 |
PROBLEM TO BE SOLVED: To provide a frozen chuck apparatus capable of fixing a thin plate while being deformed by gravity as it is without deforming the thin plate by a liquid which expands during solidification by mounting a sample on a chuck having a number of protrusions among which only the protrusions required for a specified support method are formed high, supplying the liquid between the backside of the sample deformed by gravity and the chuck and then solidifying only the liquid existing between the protrusions and the backside of the sample. SOLUTION: In the frozen chuck apparatus, the protrusions 1' and 1" of a high height for supporting the sample provided in order to support the sample by the specified support method and the protrusions 1 of a low height formed lower than the high protrusions having such a height that the sample is not brought into contact with a protrusion surface when deformed by the gravity are formed on the upper surface of a chuck plate surface 5. Only the liquids 6', 6" and 6 existing between the upper surface of a number of protrusions 1' and 1" of the high height and protrusions 1 of the low height and the backside of the sample 12 are solidified to fix the sample. COPYRIGHT: (C)2010,JPO&INPIT |
