| 摘要 |
PROBLEM TO BE SOLVED: To unite an elevation mechanism and a positioning mechanism, miniaturize a driving mechanism, provide a driving motor together with the elevation mechanism and the positioning mechanism in a vacuum chamber, and eliminate a sealing mechanism. SOLUTION: The substrate inspection apparatus is used to inspect a substrate in a vacuum chamber. The vacuum chamber includes a Z stage for supporting a substrate, a stage elevation mechanism for elevating the Z stage in Z-axis direction and an inspection mechanism for inspecting a substrate to be placed on the Z stage. The stage elevation mechanism includes an elevation cam which has a contact surface different in contact position in the Z axis direction to the horizontal-direction position, an elevation roller which is brought into contact with the contact surface of the elevation cam while it is being rotated, and a driving mechanism for moving the elevation roller or the elevation cam in the horizontal direction. When the driving mechanism is driven, the elevation roller or the elevation cam is relatively moved in the horizontal direction, and the movement in the horizontal direction relatively moves the elevation roller or the elevation cam in the Z-axis direction. Finally, the movement in the Z-axis direction elevates the Z stage. COPYRIGHT: (C)2010,JPO&INPIT |
