| 摘要 |
PROBLEM TO BE SOLVED: To provide a lift pin module of a flat panel display element manufacturing device. SOLUTION: The lift pin module of the flat display element manufacturing device, which is elevated and lowered by an elevation plate in the flat panel display element manufacturing device to support a substrate, includes a lift pin which is elevated and lowered through a lower wall of a chamber to support the substrate placed in the chamber, an enclosing member which encloses the lift pin, an upper connecting member which connects the lower wall of the chamber to an upper end of the enclosing member, a lower connecting member which connects a lower end of the enclosing member to an upper end of the elevation plate, and an elastic member disposed outside the enclosing member. The elastic member influenced by a process gas is disposed outside the flat plate display element manufacturing device to be prevented from corroding, and further not coated with an anticorrosive film to save the cost, and the lift pin and elastic member are placed in individual spaces to be prevented from being rubbed against each other. COPYRIGHT: (C)2010,JPO&INPIT |
