| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container that suppresses hindrance to a positioning operation, etc., less causes a decrease in positioning precision, and improves slidability of a positioner. SOLUTION: A plurality of positioners 8 into which a pair of positioning pins 51 are inserted are fitted to a bottom plate 2 of a container body 1 storing a semiconductor wafer, and each of the positioners 8 includes a pair of positioning blocks 9 to be opposed to each other in a state where a pair of positioning pins 51 are inserted. Each of the positioning blocks 9 is formed in a plan-view nearly square shape having an opposite surface 11 made open, and also recessed in a nearly V cross-sectioned shape such that the inclined internal surfaces 12 thereof come into contact with upper parts of positioning pins, opened opposite surfaces 11 of the pair of positioning blocks 9 being made to contact each other to communicate. The positioners 8 are post-installed, so the positioners 8 are made thin and surfaces of the positioners 8 are prevented from being uneven or from deforming owing to a deficiency in cooling during molding to cause hindrance to the positioning operation etc. COPYRIGHT: (C)2010,JPO&INPIT |
