| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for highly precisely observing the front and back surfaces of a workpiece, with comparatively simple confuguration and without much cost increase. Ž<P>SOLUTION: In the device, a reflection layer 5 which reflects light is formed on a second face 4b of a light transmission body 4 having a first and second faces 4a and 4b, a workpiece 2 is placed on the first face 4a, and a convex lens 6 is arranged with an interval from a reflection mirror 3. Further, a moving device 8 is provided so as to move at least either the convex lens 6 or the reflection mirror 3 along an optical axis 6a. In this case, the moving device 8 moves the convex lens 6 and/or the reflection mirror 3, along the optical axis between a first interval in which the distance between the convex lens 6 and the surface 2a of the workpiece 2 is made to be the focal length of the convex lens 6 by means of the moving device 8, and a second interval in which the light passes through the light transmission body 4 from the convex lens 6 and is reflected by the reflection layer 5 to comes into focus on the back surface 2b of the workpiece 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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