发明名称 DYNAMIC SCRIBE ALIGNMENT FOR LASER SCRIBING, WELDING OR ANY PATTERNING SYSTEM
摘要 <p>Methods and systems for improving the alignment between a previously formed feature and a subsequently formed feature are provided. An exemplary method can include laser scribing a workpiece (104, 550) having a previously formed first feature. The exemplary method includes imaging the workpiece (104, 550) with an imaging device (320, 420, 554, 640) so as to capture a plurality of positions of the first feature on the workpiece (104, 550) relative to the laser-scribing device (100). The exemplary method further includes using the captured positions to align output from the laser-scribing device (100) in order to form a second feature on the workpiece (104, 550) at a controlled distance from the first feature.</p>
申请公布号 WO2009126901(A3) 申请公布日期 2010.01.21
申请号 WO2009US40232 申请日期 2009.04.10
申请人 APPLIED MATERIALS, INC.;INAGAWA, MAKOTO;KURITA, SHINICHI;SHAMOUN, BASSAM;KRISHNASWAMI, SRIRAM;SHIRK, MICHAEL D.;CUNNINGHAM, KEVIN L. 发明人 INAGAWA, MAKOTO;KURITA, SHINICHI;SHAMOUN, BASSAM;KRISHNASWAMI, SRIRAM;SHIRK, MICHAEL D.;CUNNINGHAM, KEVIN L.
分类号 H01L21/78;H01L31/042 主分类号 H01L21/78
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