发明名称 Handler, Method of Transferring Test-tray, and Method of Manufacturing Semiconductor
摘要 A test handler, a packaged chip loading method, a test tray transferring method, and a packaged chip manufacturing method are provided. The test handler may include a loading unit, a chamber system, an unloading unit, at least one rotating unit and a transferring unit. The loading unit may include a loading buffer disposed to be movable along a moving path formed over a loading position and a loading picker to perform a loading process on the test tray located at the loading position. The chamber system having the packaged chips connected to a hi-fix board and tested. The unloading unit may include an unloading picker to perform an unloading process on the test tray located at an unloading position. The at least one rotating unit may be disposed between the loading unit and the unloading unit to rotate the test tray transferred from the loading unit from a horizontal posture to a vertical posture, and to rotate the test tray transferred from the chamber system from a vertical posture to a horizontal posture. The transferring unit may transfer the test tray.
申请公布号 KR100938172(B1) 申请公布日期 2010.01.21
申请号 KR20070140563 申请日期 2007.12.28
申请人 发明人
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
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