Alignment apparatus, exposure apparatus, and device manufacturing method

摘要

In an alignment apparatus having two movable elements (11a,11b) which move on a stator (2) having a planer portion, the two movable elements are prevented from moving to deviate from target position while enabling the two movable elements to swap. The alignment apparatus includes a stator which has a planer portion including first and second areas, first and second movable elements which move on the planer portion, and a regulating mechanism which regulates positions of the first and second movable elements. The first and second movable elements are driven to target positions by the Lorentz force that acts with respect to the stator. The regulating mechanism includes a first regulator (111a) which regulates the position of the movable element (11a) which is located in the first area such that the movable element will not deviate from the target position, and a second regulator (112b) which regulates the position of the movable element (11b) which is located in the second area such that the movable element will not deviate from the target position.