| 摘要 |
FIELD: machine building. ^ SUBSTANCE: system for erection into casing of devices on the basis of MEMS, contains bedding, device on the basis of micro-electromechanical systems (MEMS), formed on bedding, system board, gasket, located nearby device perimetre on the basis of MEMS and contacting to bedding and backboard. Additionally mentioned gasket allows glue, reactive gas absorber, which is in contact to gasket by inner periphery of gasket. Method and device are implemented by mentioned above system. ^ EFFECT: improvement and creation of new products. ^ 41 cl, 10 dwg |
