SENSITIVE ELEMENT OF INTEGRAL ACCELEROMETRE

摘要

FIELD: measurement equipment. ^ SUBSTANCE: invention is related to measurement equipment and may be used to manufacture integral accelerometres. Sensitive element is made of conducting single-crystal silicon and comprises pendulum connected with the help of elastic suspensions with carcass frame, which, via fixed beam, and is connected to bearing frame with the help of cantilever arrangement. Bearing frame is rigidly connected to accelerometre base by platform sites, which makes it possible to avoid contact stresses in carcass frame that impact device accuracy. ^ EFFECT: improved accuracy of device. ^ 2 dwg