发明名称 |
Oblique Incidence Interferometer |
摘要 |
<p>An oblique incidence interferometer 1 includes a light source 11 for emitting coherent light in an oblique direction to a measurement object W; a light collimating unit 12 for collimating the coherent light from the light source 11; a beam dividing unit 14 for dividing the collimated beam from the light collimating unit 12 into a measurement beam and a reference beam; a beam combining unit 15 for combining the measurement beam reflected by the measurement object W with the reference beam; and an image pickup device 17 for picking up images of interference fringes representing a surface shape of the measurement object, wherein the oblique incidence interferometer 1 includes measurement range expanding means 10 for enlarging a light measurement range on the measurement object W in a lateral direction of the measurement range.</p> |
申请公布号 |
EP2146181(A2) |
申请公布日期 |
2010.01.20 |
申请号 |
EP20090165179 |
申请日期 |
2009.07.10 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
SUZUKI, YOSHIMASA;OOTAO, REIYA |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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