发明名称 Slit coater with a standby unit for a nozzle and a coating method using the same
摘要 A slit coater with a standby unit for a nozzle and a coating method using the same prevents environmental pollution by solvent steam and simultaneously maintains the slit nozzle in an optimum state. When in standby and not performing a coating application, the slit nozzle is kept in a standby unit having a solvent atmosphere therein. The slit coater includes: a table on which an object to be processed is positioned; a slit nozzle for applying a coating solution onto a surface of the object; and a standby unit into which the slit nozzle is loaded when on standby, and having a shutter at the opening thereof to maintain an inner space in a substantially hermetically sealed solvent atmosphere. The atmosphere in the standby unit is configured to prevent hardening of the coating solution in the slit nozzle and thereby maintain the slit nozzle in the optimum state for providing coating applications.
申请公布号 US7647884(B2) 申请公布日期 2010.01.19
申请号 US20050211214 申请日期 2005.08.19
申请人 LG. DISPLAY CO., LTD. 发明人 KWON O JUN;CHO KANG IL;NOH JI SEONG;PARK JEONG KWEON;PARK JIN TAE
分类号 B05C5/02 主分类号 B05C5/02
代理机构 代理人
主权项
地址