APPARATUS FOR ADJUSTING MAGNETIZATION DISTANCE AND MAGNETRON SPUTTERING EQUIPMENT HAVING THE SAME

摘要

PURPOSE: An apparatus for adjusting a magnetization distance and magnetron sputtering equipment having the same are provided to prevent the magnetization of a target by separating the distance between a target and a magnetron. CONSTITUTION: A magnetron unit conveyor for magnetization prevention includes a magnetron unit(200) and a moving unit. The magnetron is arranged at the proximity of a target(130). The magnetron unit forms constant magnetic field. The target is formed with the metal. A movable unit is separated from a magnetron and the target by a certain interval to make magnetic filed in predetermined magnetic field.