APPARATUS AND METHOD FOR COATING A SUBSTRATE

摘要

PURPOSE: An apparatus and a method for coating a substrate are provided to implement a uniform coating film over a substrate by installing a dummy coating unit which is rotatable at the both sides of the stage. CONSTITUTION: A substrate(120) is mounted in a stage(110). The stage supports the substrate. A dummy coating unit(160) is arranged on both sides of the stage. A coating material is spread on the substrate through a coating nozzle(140). A coating film(130) is formed on the substrate. A coating material supply unit(150) supplies the coating material to the coating nozzle. The coating nozzle is transferred in an acceleration section, a normal speed section, and deceleration section according to operation of a conveying unit.