| 摘要 |
For superior wear resistance to conventional TiN hard films and TiAlN hard films, a hard film contains (Zr1-a, Hfa) (C1-xNx), wherein "a" and "x" are the atomic ratios of Hf and N, respectively, and satisfy the following conditions: 0.05<=a<=0.4 and 0<=x<=1. Another hard film contains (Zr1-a-b, Hfa, Mb) (C1-xNx), wherein M is at least one of W and Mo; and "a", "b", and "x" are the atomic ratios of Hf, M, and N, respectively, and satisfy the following conditions: 0<=1-a-b, 0<=a, 0.03<=b<=0.35, and 0<=x<=1.
|
