APPARATUS FOR INSPECTING SILICON STRUCTURE UTILIZING BEAM SPLITTER AND METHOD OF INSPECTING SILICON STRUCTURE UTILIZING THE SAME

摘要

PURPOSE: An apparatus and a method for inspecting a silicon structure using a beam splitter are provided to safely and quickly inspect the inner or rear sides of the silicon structure without damaging the silicon structure. CONSTITUTION: An apparatus for inspecting a silicon structure comprises a light source(100), a beam splitter(200), a collimated light generator(300), and an optical detector(600). The light source projects laser beam. The beam splitter separates the laser beam projected by the light source. The collimated light generator receives the separated light beam and converts it into collimated light, and projects the collimated light to the whole surface of the silicon structure. The optical detector measures the power of the laser light passing through the silicone structure.