| 摘要 |
<p>PURPOSE: A substrate processing apparatus and a substrate transfer method thereof are provided to reduce the time for transferring containers to a load port by employing buffer ports additionally. CONSTITUTION: A substrate processing apparatus comprises a process module(100), a main loader, a buffer loader, and a port conveying unit(500). The process module performs treatment of substrates. The main loader is installed on the leading end of the process module to store containers accommodating respective substrates and transfer the substrate between the containers and the process module. The buffer loader is located opposite to the process module about the main loader and stores the containers. The port conveying unit is located between the main loader and the buffer loader to transfer the containers between the loaders.</p> |
