DURCHSICHTIGER, LEITENDER SCHICHTFÖRMIGER ÜBERZUG AUS INDIUMZINNOXID

摘要

A transparent electrically conductive device which includes an indium tin oxide film is improved by providing an indium tin oxide film which contains a graded stack of individual indium tin oxide layers wherein the atomic percent of tin in the layers can be individually selected. Each indium tin oxide layer of the film contains 1-99 atomic percent tin. Each layer is made by a physical vapor deposition process or by sputter coating. Preferably the film which contains a plurality of indium tin oxide layers is applied to a transparent flexible substrate such as a polymeric sheet. Optional primer layers, hardcoat layers and topcoat layers may be included in the device.