| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently wash a large-sized filling apparatus 1 having air passages 58 and 60 in a short time, and to prevent temperature of the inside from decreasing. Ž<P>SOLUTION: The filling apparatus has a filling liquid tank 24 accommodating filling liquid, many filling nozzles 10 each filling the liquid into a vessel 4, a liquid supply passage 22 through which the filling liquid is supplied to each nozzle, filling valves 50 mounted corresponding to filling nozzles, gas passages 58 and 60 mounted corresponding to the filling nozzles to supply and discharge gas, opening and closing valves 64 and 70 or the like of the gas passages. When the apparatus is washed, the washing liquid is supplied to the liquid supply passage 22, and part of the filling valves separated of all the filling nozzles 10 are opened to circulate the washing liquid. The washing liquid is supplied to the gas passages corresponding to the closed valves, and the opening and closing valves are opened to circulate the washing liquid. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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