| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate conveyance apparatus excellent in maintaining the posture of substrates. <P>SOLUTION: In the substrate conveyance apparatus including a pair of guide members 41 for carrying-out a substrate B, which has been carried-in from a substrate inlet 4, from a substrate exit 5, and a substrate transfer mechanism for transferring the substrate B between the pair of guide members 41, the pair of guide members 41 includes a pair of guide surfaces 28 opposing, respectively, both side surfaces of the substrate B, roller member-support shafts 30 provided on the side of the substrate inlet 4 of the pair of guide surfaces 28 in the direction perpendicular to the transferring direction of the substrate B, roller members 31 having their external peripheral surfaces situated on the extended line of the pair of guide surfaces 28, and jigs 43 provided on the side of the substrate exit 5 of the pair of guide surfaces 28 and each having a surface 45 continuous with each of the pair of guide surfaces 28 on the same plane. <P>COPYRIGHT: (C)2010,JPO&INPIT |
