SUBSTRATE CARRYING TOOL AND METHOD OF MANUFACTURING ELEMENT SUBSTRATE

摘要

<P>PROBLEM TO BE SOLVED: To reliably form an adhesion layer within a predetermined region using a liquefied adhesive material. Ž<P>SOLUTION: The substrate carrying tool 20 includes a hold substrate 10a holding a flexible substrate on its surface and the liquefied adhesive 12a adhering the flexible substrate. A frame-shaped tacking layer 11a encapsulating the adhesive 12a within it when the flexible substrate is held is formed on the surface of the hold substrate 10a. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž