SEMICONDUCTOR PHYSICAL QUANTITY SENSOR

摘要

<P>PROBLEM TO BE SOLVED: To prevent a mass part from sticking to a fixed electrode when a large physical quantity is applied without decreasing detection sensitivity. Ž<P>SOLUTION: A groove part 9 is formed between the mass part 5 and a lower glass substrate 4 so that the mass part 5 is not brought into contact with the lower glass substrate 4 under normal acceleration. A metallic film 12 is formed on the surface of the mass part 5 facing the bottom surface of the groove part 9. A metallic film 13 is formed on the bottom surface of the groove part 9. The metallic film 13 is connected to a flip mounting bump 15 in a through-hole 14 formed in the lower glass substrate 4. This structure allows the mass part 5 to be attracted to the lower glass substrate 4 through electrostatic force by applying voltage to between the metallic film 12 and the metallic film 13, thereby allowing the mass part 5 to be separated from the fixed electrode 8 even when the mass part 5 sticks to the fixed electrode 8. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž