| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple method for preventing an occurrence of a notch at a feed port in a liquid jet recording head forming a feed port by dry etching. SOLUTION: A Ta film which is a protection film and a metallic film is used as an etching stop layer of a feed port instead of a conventional thermal oxidation film. Thus, the protection film comprised of Ta being a metal is adopted as the etching stop layer without introducing a new metallic film as the etching stop layer, so that an occurrence of a notch is prevented. COPYRIGHT: (C)2010,JPO&INPIT
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