METHOD AND APPARATUS FOR COMPENSATING FOR OFF-AXIS FOCAL SPOT DISTORTION

摘要

A method and apparatus is described that allows accurate control of the width of fine line structures ablated by lasers in thin films on substrates when using scanner and focussing lens systems. The method provides dynamic compensation for optical distortions introduced by the scan lens at off axis points by increasing the laser power or energy in the beam in order to overcome the reduction in power or energy density.