发明名称 |
INTERFEROMETRY FOR DETERMINING CHARACTERISTICS OF AN OBJECT SURFACE, WITH SPATIALLY COHERENT ILLUMINATION |
摘要 |
Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; a multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
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申请公布号 |
WO2008151266(A3) |
申请公布日期 |
2010.01.14 |
申请号 |
WO2008US65863 |
申请日期 |
2008.06.05 |
申请人 |
ZYGO CORPORATION;DE LEGA, XAVIER COLONNA;DE GROOT, PETER |
发明人 |
DE LEGA, XAVIER COLONNA;DE GROOT, PETER |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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