发明名称 SOLUTION PLASMA DISCHARGE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a plasma discharge device capable of maintaining a stable plasm state by lowering a voltage per a distance between discharging electrodes in a solution plasm discharge. <P>SOLUTION: The solution plasma discharge device 101 has a concave part 3 storing air bubbles generated by plasma in liquid 12 on a substrate 2 positioned in an upper part of a discharging electrode 1, and since a distance between the discharging electrodes can be made longer or an applied voltage between the discharging electrodes can be lowered by carrying out plasma discharge in the bubbles staying in the concave part 3, a voltage per a distance between the discharging electrodes can be lowered to maintain a stable plasma state. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010009993(A) 申请公布日期 2010.01.14
申请号 JP20080169374 申请日期 2008.06.27
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 NAKAJIMA TATSURO;MATSUDA NAOKI
分类号 H05H1/24;B01J19/08 主分类号 H05H1/24
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