| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser apparatus having two pairs of electrodes in a resonator adapted for alternate oscillation that accommodates an insulation structure between electrodes of pre-ionization sources in the space of an insulation region between the electrodes. SOLUTION: The pre-ionization electrodes arranged adjacently to electrodes 30a to 30d serving as main discharge electrodes include alumina ceramic pipes 40a and 40b sealed at one end, inner pre-ionization electrodes 41a and 41b, and outer pre-ionization electrodes 42a and 42b having a plate shape. The pipes 40a and 40b are separated and sealed at one end. The outer pre-ionization electrodes 42a and 42b are at the ground potential, and a high voltage pulse is applied between the inner pre-ionization electrodes 41a and 41b and the outer pre-ionization electrodes 42a and 42b to develop corona discharges. The pipes 40a and 40b are separated and sealed at one end, so that insulation can be ensured between the inner pre-ionization electrodes 41a and 41b. The pipes may be coupled and sealed, for example, at the middle instead of being separated and sealed at one end. COPYRIGHT: (C)2010,JPO&INPIT |
