| 摘要 |
PROBLEM TO BE SOLVED: To prevent a wafer from being damaged when holding the wafer. SOLUTION: A wafer holding jig 3 includes a plurality of wafer holders 12, 11 with which wafer holding grooves 13, 11 which partially hold the outer circumference of a wafer W are formed, and a holder line in which a plurality of wafer holders 12 are connected. In the wafer holding jig, a plurality of wafer holders 12 (12a, 12b) in the holder line are bent to a side where the wafer W is held with respect to the neighboring wafer holder 12 (12b, 12c), so that the outer circumference of the wafer W is held in portions of wider range than the half of the circumference. COPYRIGHT: (C)2010,JPO&INPIT |
