DEVICE AND METHOD FOR FORMING CONTACTLESS CONTACT OF CONDUCTIVE STRUCTURE, PARTICULARLY, THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To execute an inspection even under a substrate where a contact cannot be formed mechanically, as conventionally for a conductive structure. SOLUTION: The device is configured so as to form an electric field by excitation, without making mechanical contact of the conductive structure (3). COPYRIGHT: (C)2010,JPO&INPIT