METHOD FOR FORMING THIN FILM OF OXIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a thin film of an oxide which retains the orientation of a metal substrate. SOLUTION: The method includes the step of vapor-depositing a material made of a metal or a metal oxide on a heated, orientated metal substrate in an atmosphere containing oxygen, with an electron-beam evaporation technique. The above vapor-deposition step is conducted by setting a partial pressure of water vapor in the atmosphere at 1×10-4Pa or lower, and by controlling at least one of a partial pressure of oxygen in the atmosphere and a film-forming temperature. COPYRIGHT: (C)2010,JPO&INPIT