摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon single crystal production apparatus and a silicon single crystal production method which each reduces the collision of a silicon solid raw material against a crucible and suppresses the adhesion of a silicon melt to a raw material filling container. Ž<P>SOLUTION: A crucible 4 which melts a silicon solid raw material, a raw material filling container 18 being a feed apparatus which feeds the solid raw material and containing a raw material feed part 19 which feeds the solid raw material into the crucible 4, and a raw material feed part cover which covers the raw material feed part 19 and tapers toward an opening formed on the crucible side 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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