SAMPLE WAFER FOR CALIBRATION OF IMAGE INSPECTION DEVICE, AND CALIBRATION METHOD OF IMAGE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sample wafer for calibration that is used for calibration of an image inspection device performed for keeping the inspection accuracy of pinhole inspection and efficiently performs the calibration by providing a hard laser mark on a surface. SOLUTION: This sample wafer for calibration is used for calibration of the image inspection device for inspecting a pinhole defect of a silicon wafer by image processing. The hard laser mark is provided on the surface of the sample wafer for calibration. COPYRIGHT: (C)2010,JPO&INPIT