发明名称 |
CATALYSTS USEFUL IN THE PURIFICATION OF SILICON TETRAFLUORIDE |
摘要 |
Processes for purifying silicon tetrafluoride source gas by subjecting the source gas to one or more purification processes including: contacting the silicon tetrafluoride source gas with an ion exchange resin to remove acidic contaminants, contacting the silicon tetrafluoride source gas with a catalyst to remove carbon monoxide, by removal of carbon dioxide by use of an absorption liquid, and by removal of inert compounds by cryogenic distillation; catalysts suitable for removal of carbon monoxide from silicon tetrafluoride source gas and processes for producing such catalysts.
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申请公布号 |
US2010009844(A1) |
申请公布日期 |
2010.01.14 |
申请号 |
US20090563572 |
申请日期 |
2009.09.21 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
REVANKAR VITHAL;IBRAHIM JAMEEL |
分类号 |
B01J21/08;B01J21/02;B01J21/04;B01J21/06;B01J23/00;B01J23/08;B01J23/26;B01J23/28;B01J23/34;B01J23/50;B01J23/72;B01J23/75 |
主分类号 |
B01J21/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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