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发明名称
Gasbehandlungssysteme
摘要
申请公布号
DE112008000169(T5)
申请公布日期
2010.01.14
申请号
DE20081100169T
申请日期
2008.01.11
申请人
VEECO INSTRUMENTS INC.
发明人
MITROVIC, BOJAN;GURARY, ALEX;ARMOUR, ERIC A.
分类号
H01L21/205;C23C16/455
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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