发明名称 ACTUATOR DEVICE AND TEMPERATURE ADJUSTMENT METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an actuator device with high efficiency of resource. <P>SOLUTION: The actuator device includes: a fluidic actuator that is operated by driving force produced by the pressure of working fluid; an heat exchange unit that absorbs heat from a heating element using as a medium the working fluid discharged from the fluidic actuator; and a working fluid flow path for causing working fluid to flow from a temperature adjustment unit back to the fluidic actuator. The heating element is, for example, an electromagnetic actuator that is operated by driving force produced by electromagnetic force. The working fluid can be air or a liquid of fluorine compound. The actuator device may be additionally provided with a temperature controller that controls the temperature of working fluid within a predetermined set temperature range. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010011557(A) 申请公布日期 2010.01.14
申请号 JP20080164981 申请日期 2008.06.24
申请人 NIKON CORP 发明人 TANAKA TOSHIHISA;SANADA SATORU;NAKAHIRA NORIO
分类号 H02K9/02;H01L21/027 主分类号 H02K9/02
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