| 摘要 |
PROBLEM TO BE SOLVED: To provide a protective structure of a fluid machine capable of preventing secondary breakage and damage from occurring by accurately detecting a variation in the state of a movable section at all times and accurately determining whether the variation is normal or not. SOLUTION: In this fluid machine, a movable section on which a sensor layer having a sensor function is formed beforehand is assembled, and the output terminal of the sensor layer is installed in such a manner as to be able to take out output signals. COPYRIGHT: (C)2010,JPO&INPIT
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