摘要 |
PROBLEM TO BE SOLVED: To provide a structure which has a uniform insulating film with superior electric insulation and a method of manufacturing the same, a resin composition which can form the insulating film, and an electronic component. SOLUTION: The method of manufacturing the structure which has the insulating film includes a step of coating a substrate having a hole portion with a solvent, a step of coating the substrate with the resin composition so that the resin composition may come into contact with the solvent in the hole portion, a step of forming films 117, 118, and 119 containing a resin component on at least an internal wall surface between the internal wall surface and a bottom surface of the hole portion by drying the coating, a heating and curing step of heating the film formed on the entire surface of the substrate including the internal wall surface and bottom surface of the hole portion into insulating films 217, 218, and 219 containing a cured body of the resin component, and a surface and bottom surface-side insulating film removing step of removing the insulating film 219 formed on the surface of the substrate and the insulating film 218 formed on the bottom surface of the hole portion of the substrate, and leaving the insulating film 217 formed on the internal wall surface of the hole portion. COPYRIGHT: (C)2010,JPO&INPIT
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