| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized, high-performance probe card. SOLUTION: The probe card 20 includes: a main substrate 30 to which a signal is inputted from an outside source; and a wiring substrate 21, provided with a plurality of vertical probes 22, which is in conduction with the main substrate 30. Each of the vertical probes 22 has: a connection section 23 fixed to the wiring substrate 21; an elastic support section 25, released from the wiring substrate 21, which extends from the connection section 23; and a contact section 24 provided at a distal end of the support section 25. The support section 25 is contained in the connecting section 23, when seen in a plan view. COPYRIGHT: (C)2010,JPO&INPIT
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