发明名称 STRAIN DETECTOR AND STRAIN DETECTING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a strain detector and a strain detecting method, which employ a large gauge factor enabling a minute strain to be detected, adjust the gauge factor easily and need no precise measuring circuit. Ž<P>SOLUTION: The strain detector includes; a strain detecting element having a gate electrode, a source electrode, a drain electrode and a layer made of a piezo-electric material where a channel is formed; a voltage applying means for applying a gate/source voltage across the gate electrode and the source electrode of the strain detecting element; a current detecting means for detecting drain/source current flowing between the drain electrode and the source electrode of the strain detecting element; and a strain amount detecting means for detecting an amount of the strain, based on a detected result of the current detecting means. The strain detector is characterized by applying the gate/source voltage so that a current variation value becomes a prescribed value or more, which is a difference between the drain/source current when applying no strain to the strain detecting element and the drain/source current when applying a prescribed strain to the strain detecting element. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010008167(A) 申请公布日期 2010.01.14
申请号 JP20080166493 申请日期 2008.06.25
申请人 TOYOTA MOTOR CORP 发明人 HAYASHI SHOJI;KUSHIDA TOMOYOSHI;YOKOYAMA ATSUKO;SENDA HIDEMI;WATANABE HIKARI
分类号 G01B7/16;G01L1/18;H01L29/84 主分类号 G01B7/16
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