SUBSTRATE CONVEYING DEVICE

摘要

One problem associated with substrate-conveying devices is that, when a first substrate (1) has been placed on a supply lift (11) and is being conveyed from an upper workbench (10) to a lower workbench (20), a wait is imposed on a second substrate (2) which has finished undergoing an ultraviolet cleaning process on the upper workbench (10) as shown in Figure 2, and, consequently, productivity is reduced due to the delay in supplying other substrates through a supply and discharge part (15). The present invention relates to a substrate conveying device which conveys a substrate supplied to an upper first position to a lower second position and moves and discharges the substrate conveyed to the second lower position by means of a conveying rail, wherein first and second upper rotational supports and first and second lower rotational supports rotate in a state in which they are vertically spaced apart from each other.