| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing process management system capable of automating the creation, collection, division, and integration of lots. <P>SOLUTION: The semiconductor manufacturing process management system comprises: a storage means 10 for storing respective information data of lots, devices, and carriers, and grade information data of lots, devices, and carriers; a user interface 11 for displaying the lot and carrier information data on a worker's operation terminal 8 and receiving the input of lots, carriers, and transfer quantities selected by a worker; a transfer information generation means 12 for generating transfer information data by checking the grade information data of lots and carriers based on the received input; a control information generation means 13 for comparing lot selection with the grade information data of lots, carriers, and devices, based on the device and transfer information data, selecting receivable optimum devices and arms, and generating control information data and conveyance information data; and an update means 14 for updating the lot information data, based on the wafer transfer result in a wafer transfer device. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
