POSITION MEASURING METHOD, AND EXPOSURE METHOD AND DEVICE

摘要

Provided is a position measuring method capable of correcting straightness information relating to a reflection plane used for measuring position information relating to a mobile object in a short time.  The position measuring method for measuring the position of a plate stage (PST) by means of a moving mirror (51Y) comprises a step for acquiring first straightness information relating to the moving mirror (51Y) by repeating the movement of the plate stage (PST) in the X direction and the position measurement of the moving mirror (51Y) in the Y direction a first number of times, a step for acquiring second straightness information relating to the moving mirror (51Y) by repeating the movement of the plate stage (PST) in the X direction and the position measurement of the moving mirror (51Y) in the Y direction a second number of times smaller than the first number of times, and a step for correcting the first straightness information with the second straightness information.