METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO WATCH

摘要

PROBLEM TO BE SOLVED: To manufacture a high-quality piezoelectric vibrator which reliably maintains airtightness inside a cavity and secures stable conductivity between a piezoelectric vibration chip and an external electrode.

SOLUTION: The piezoelectric vibrator is manufactured by a method including: a through-hole forming process for forming a plurality of through-holes 30 to a base board wafer 40; a core material part insertion process for inserting a core material part 7 of a rivet 9 into the through-hole from one side of the wafer; a melting process which closes an open end on one side in the through-hole by abutting a reverse side of a base part 8 of the rivet body to the wafer, melts a surface part on the other side of the wafer by heating while applying pressure to the other side of the wafer to produce a liquid base board material 41, supplies the material into a gap between an inner peripheral wall and the rivet from the other side of the through-hole, and closes the gap; a hardening process for cooling the material supplied into the gap and hardening it; and a polishing process for polishing the wafer and the rivet so as to remove the base part and to flatten the wafer and the core material part.

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