| 摘要 |
PROBLEM TO BE SOLVED: To equalize beam divergences in the discharge directions of laser beams by a discharge on the front mirror-side and laser beams by the discharge on the rear mirror-side in a pulse gas laser device conducting an alternate oscillation by arranging a plurality of electrode pairs in the same resonator. SOLUTION: A plurality of a pair of the electrodes 30a to 30d are fitted in a chamber 30 sealing a laser gas, and the discharge is generated by successively applying a pulse-shaped voltage to the electrodes 30a to 30d. The laser gas is resonated by the resonator composed of a rear mirror 36 and a front mirror 37, and laser beams injected from an oscillation-stage laser 100 are amplified and output. A slit 50 is formed on the front mirror 37 side as the outgoing side of laser beams, and a size in the discharge direction of laser beams is made the same as or smaller than a beam size in the discharge direction of laser beams outputted by the discharge between the electrodes 30a and 30b. COPYRIGHT: (C)2010,JPO&INPIT |
