| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an electromechanical structure capable of easily forming a mechanical reinforcing pillar with any width dimension in a sacrificial layer. SOLUTION: The manufacturing method for the electromechanical structure comprises a step of forming a well region 5<SB>1</SB>which defines at least one mechanical reinforcing pillar in the sacrificial layer 2 by partially etching the sacrificial layer 2 formed on a single crystal material layer 1', a step of covering at least the free surface of the well region and its surrounding sacrificial layer with a first function-imparting layer 4 formed of a first material, a step of forming a filler layer 6 formed of a second material different from the first material on the first function-imparting layer 4 including the well region and then grinding the filler layer 6 to the surface of the first function-imparting layer 4 so that the filler layer 6 is remained only at the well region, and a step of releasing the electromechanical structure by at least partially etching and removing the sacrificial layer 2 through an opening 10 formed at the single crystal material layer 1'. COPYRIGHT: (C)2010,JPO&INPIT |
