MOVABLE STRUCTURE AND MICROMIRROR ELEMENT USING THE SAME

摘要

<P>PROBLEM TO BE SOLVED: To enhance the stability of the rocking motion of a movable plate by increasing the tensile rigidity and the bending rigidity of a movable structure while suppressing the torsional rigidity of a hinge part. Ž<P>SOLUTION: A hinge part 3 having a ladder-shape with a hollow part 3c is formed of a pair of support parts 3a and a bar part 3b passing over the pair of support parts 3a, so that the movable plate 2 is freely turnably supported. While torsional rigidity around the turning axis of the hinge part 3 is suppressed by the hollow part 3c of the hinge part 3, the tensile rigidity and the bending rigidity are increased. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž