| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance impact resistance by preventing hinges from being damaged even if an impact is provided from the outside thereto in a semiconductor machine structure. Ž<P>SOLUTION: An optical scanning mirror 1 has: a semiconductor part 100 composed of an SOI substrate 200; and an upper part protection substrate 110 and a lower part protection substrate 120 which are made of a glass substrate and bonded on the upper face and the lower face of the semiconductor part 100, respectively. In the semiconductor part 100, a movable part 50 is rockably journaled on a fixed frame 4 with a first hinge 5. In the recessed part 112a of the upper part protection substrate 110, a stopper 115 is projectingly provided directed toward the rocking shaft of the movable part 50. In the recessed part 121 of the lower part protection substrate 120, a stopper 125 is projectingly provided directed toward the rocking shaft of the movable part 50. With the stopper 115 and the stopper 125 equipped, the dislocation of the movable part 50 in z-direction is limited and the first hinge 5 is prevented from being damaged even if an impact is provided from the outside thereon. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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