| 摘要 |
A vacuum apparatus, which conveys a large-sized substrate and saves space, is provided. The vacuum apparatus of the present invention comprises pluralities of lower rollers, pressing rollers and pressing mechanisms. Since the substrate is sandwiched by the lower rollers and the pressing rollers at a position between the conveying roller and the conveying roller, the substrate does not fall down. The substrate contacts the pressing rollers and pushes the pressing roller back, and is sandwiched between the pressing roller and the lower roller, so that the substrate is not damaged when sandwiched.
|
