| 发明名称 |
DEFORMATION MEASURING APPARATUS, EXPOSURE APPARATUS, JIG FOR DEFORMATION MEASURING APPARATUS, POSITION MEASURING METHOD AND DEVICE MANUFACTURING METHOD |
| 摘要 |
<p>A base member (51) is provided with a piezoelectric element (52). A deformation measuring apparatus has a regulating apparatus (S) which regulates transmission of deformation in a second direction (x) which intersects with a first direction (y), among deformation transmitted to the piezoelectric element through the base member.</p> |
| 申请公布号 |
WO2010005081(A1) |
申请公布日期 |
2010.01.14 |
| 申请号 |
WO2009JP62612 |
申请日期 |
2009.07.10 |
| 申请人 |
NIKON CORPORATION;KAMIYAMA TAKAHIDE;FUJIMAKI NORIHIKO |
发明人 |
KAMIYAMA TAKAHIDE;FUJIMAKI NORIHIKO |
| 分类号 |
G01B7/16;G03F7/20;G03F9/00;H01L21/027 |
主分类号 |
G01B7/16 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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