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发明名称
Manufacturing method of the multicomponent metal oxide thin film
摘要
申请公布号
KR100936947(B1)
申请公布日期
2010.01.14
申请号
KR20070086963
申请日期
2007.08.29
申请人
发明人
分类号
C23C28/00;C23C12/00
主分类号
C23C28/00
代理机构
代理人
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